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(dielectric layer), including the planarization polishing of oxides, metals, STI, SOI, MEMS, and other products. The air bag film is used for flexible pressurization to realize nanoscale precision removal. These machines are equipped with the semi-automatic chip loading and unloading system. The EPD functions such as friction, eddy current, and online infrared detection are optional.</div> </div> <div class="parameter-nav"> <a href="javascript:;" class="font18 cur" data="129">TMP-200S</a> <a href="javascript:;" class="font18 " data="130">TMP-300S</a> </div> <div class="tsemid-product-detial-parameter-list" id="parameterlist"> <div class="tsemid-product-detial-parameter num3"> <li><span class="font14">Wafer Size</span><p class="font18">6/8 inch</p></li> <li><span class="font14">Wafer Airbag Pressure</span><p class="font18">70-700 g/cm虏</p></li> <li><span class="font14">Diameter of Plates</span><p class="font18">OD530 mm</p></li> </div> </div> <style> .parameter-nav {padding: 2.5rem 0 0 0;overflow: hidden;} .parameter-nav a {display: block;float: left;margin-right: 4rem;color: #999;} .parameter-nav a:last-child {margin-right: 0;} .parameter-nav a.cur {color: #372e50;} .tsemid-product-detial-parameter {margin-top: 0;} </style> <script type="text/javascript" > $('.parameter-nav a').on('click', function() { $('.parameter-nav a').removeClass("cur"); 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