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class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">鍗婂浣撳埗閫犱腑涓嶅悓璁惧鐨勪笉鍚屼綔鐢?/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p>鍦ㄨ姱鐗囧埗浣滆繃绋嬩腑锛岃捣鍒板叧閿綔鐢ㄧ殑澶у瀷璁惧澶氱澶氭牱锛屽畠浠悇鑷湪鑺墖鍒堕€犵殑涓嶅悓闃舵鍙戞尌鐫€涓嶅彲鎴栫己鐨勪綔鐢ㄣ€備互涓嬫槸涓€浜涘叧閿殑澶у瀷璁惧鍙婂叾浣滅敤锛欬/p> <p> </p> <p>1. 鎷夊埗鍗曟櫠璁惧</p> <p>浣滅敤锛氱敤浜庢媺鍒跺崟鏅剁妫掞紝鏄姱鐗囧埗閫犵殑璧风偣銆傞€氳繃鐩存媺娉曪紙CZ娉曪級鎴栧尯鐔旀硶锛團Z娉曪級锛屽皢纭呭師鏂欑啍铻嶅悗锛岀敤绫芥櫠寮曞褰㈡垚鍗曟櫠纭呮銆侟/p> <p>閲嶈鎬э細鍗曟櫠纭呮鐨勮川閲忕洿鎺ュ奖鍝嶅悗缁姱鐗囧埗閫犵殑鎴愬搧鐜囧拰鎬ц兘銆侟/p> <p>2. 钖勮啘娌夌Н璁惧</p> <p>浣滅敤锛氬湪纭呯墖琛ㄩ潰褰㈡垚鍔熻兘钖勮啘锛屽姘у寲纭呫€佹爱鍖栫绛夈€傚父鐢ㄧ殑鏈夌瓑绂诲瓙鍖栧姘旂浉娌夌Н锛圥ECVD锛夎澶囧拰鐗╃悊姘旂浉娌夌Н锛圥VD锛夎澶囥€侟/p> <p>閲嶈鎬э細钖勮啘鐨勮川閲忓拰鍧囧寑鎬у鍚庣画鍏夊埢鍜岀數璺舰鎴愯嚦鍏抽噸瑕併€侟/p> <p>3. 鍏夊埢璁惧</p> <p>浣滅敤锛氬皢璁捐濂界殑鐢佃矾鍥炬閫氳繃鍏夊埢鑳惰浆绉诲埌纭呯墖琛ㄩ潰鐨勮杽鑶滀笂銆傚厜鍒绘満鏄崐瀵间綋鍒堕€犱笟鐨勬牳蹇冭澶囦箣涓€銆侟/p> <p>閲嶈鎬э細鍏夊埢鐨勭簿搴︾洿鎺ュ喅瀹氫簡鑺墖涓婄數璺殑鏈€灏忕嚎瀹斤紝鏄姱鐗囨€ц兘鎻愬崌鐨勫叧閿洜绱犮€侟/p> <p>4. 鍒昏殌璁惧</p> <p>浣滅敤锛氬幓闄ゅ厜鍒诲悗鏈鍏夊埢鑳惰鐩栫殑钖勮啘閮ㄥ垎锛屽舰鎴愮數璺浘妗堛€傜瓑绂诲瓙鍒昏殌鏈烘槸甯哥敤鐨勫埢铓€璁惧涔嬩竴銆侟/p> <p>閲嶈鎬э細鍒昏殌鐨勭簿搴﹀拰鍧囧寑鎬х洿鎺ュ奖鍝嶈姱鐗囩殑鎬ц兘鍜屽彲闈犳€с€侟/p> <p>5. 鍑忚杽鏈裹/p> <p>浣滅敤锛氬皢鏅跺渾鑳岄潰鍩轰綋鏉愭枡杩涜鍘婚櫎锛屼互婊¤冻鑺墖灏佽鍘氬害灏哄鍜岃〃闈㈢矖绯欏害鐨勮姹傘€傚噺钖勬満閫氳繃鐮旂（瀹炵幇鏅跺渾鍘氬害鐨勭簿纭帶鍒躲€侟/p> <p>閲嶈鎬э細鍑忚杽鏈哄湪鑺墖灏佽鍓嶅鏅跺渾杩涜鍔犲伐锛岀‘淇濊姱鐗囧皝瑁呯殑璐ㄩ噺鍜屾暎鐑晥鏋溿€侟/p> <p>6. 鎶涘厜鏈猴紙CMP锛堻/p> <p>浣滅敤锛氶€氳繃鍖栧鍜屾満姊版柟娉曞皢鏅跺渾琛ㄩ潰鎶涘厜锛屾竻闄よ〃闈㈢殑涓嶅潎鍖€鍜岄檷浣庣矖绯欏害锛屽疄鐜版櫠鍦嗚〃闈㈢殑鍏ㄥ眬骞冲潶鍖栥€侟/p> <p>閲嶈鎬э細CMP鏄姱鐗囧埗閫犱腑鐨勫叧閿伐鑹轰箣涓€锛屽浜庢彁楂樺悗缁厜鍒诲拰娌夌Н宸ヨ壓鐨勭簿搴︺€佺‘淇濆灞傜數璺粨鏋勭殑鍧囧寑鎬ц嚦鍏抽噸瑕併€侰MP鎶€鏈殑搴旂敤鑳藉鏄捐憲鎻愰珮鑺墖鐨勬€ц兘鍜屾垚鍝佺巼銆侟/p> <p>缁间笂鎵€杩帮紝鍑忚杽鏈恒€佹姏鍏夋満锛圕MP锛夌瓑璁惧鍦ㄨ姱鐗囧埗浣滆繃绋嬩腑閮借捣鍒颁簡鍏抽敭浣滅敤銆傚畠浠悇鑷湪涓嶅悓鐨勫埗閫犻樁娈靛彂鎸ョ潃涓嶅彲鎴栫己鐨勪綔鐢紝鍏卞悓淇濊瘉浜嗚姱鐗囩殑楂樿川閲忕敓浜с€傞殢鐫€鍗婂浣撴妧鏈殑涓嶆柇鍙戝睍锛岃繖浜涜澶囦篃鍦ㄤ笉鏂洿鏂版崲浠ｏ紝浠ユ弧瓒虫洿楂樼殑鍒堕€犺姹傚拰鏇村鏉傜殑鍒堕€犲伐鑹恒€侟/p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index337.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">鑺墖鑷冲叧閲嶈鐨勭（鎶涙妧鏈?/div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index339.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> 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